Wafer
- Diameter: 300 mm
- Wafer material: Si
- Thickness: 780 µm
- Die pitch: 32800 µm x 1160 µm
- Street width: 80 µm
Results and benefits
- Modification width: 60 µm
- Outer width: 55 µm
- Inner width: 49 µm
- Groove depth: 5 ~ 7 µm
- Burr height: 1.5 µm max
Wafer
Results and benefits