Sapphire (200μm >)

• Diameter: 150 mm
• Wafer material: Sapphire
• Thickness: 250 µm
• Die pitch: 2725 µm x 1770 µm
• Street width: 140 µm

Results

• Scribe width: 13.3 – 14.8 µm
• Burr height: < 3 µm
• UPH : 8 – 10