Tuners & Switches: GaAs (110 µm) Wafer Diameter: 150 mm Wafer material: GaAs Thickness: 90 µm Die pitch: 602 µm x 655 µm Street width: 41 µm Results Dicing width: 17 µm Burr height: ≈3 µm Productivity: 3.3 wafers per hour