Diffractive Optical Element (DOE)

The ASMPT Multi Beam Laser Technology is using Diffractive Optic Elements (DOE) for splitting up a single laser beam into numerous beams, each with relative low power. This Technology ensures a good process quality, while the large number of beams ensure a high productivity. Typically, 6 to 80 beams are used in the ASMPT laser processing machines. Depending on the application different laser beam configurations can be selected.

Multi Beam configurations:

  • One dimensional (all beams in one line)
  • Two dimensional (matrix or V-shape)

Using this technology, system parameters such as DOE type, laser intensity (= power / irradiated surface), focus position, pulse duration, pulse repetition frequency and feed rate are available to optimize the processing result.